Method for creating machining data for use in hybrid ultraprecision machining device, and hybrid ultraprecision machining device

A hybrid ultraprecision machining apparatus for manufacturing a micro-machined product from a workpiece, the machining apparatus comprising:

• a laser-machining tool that roughly machines the workpiece;
• a cutting tool that precisely machines the roughly machined workpiece;
• a shape-measurement device, including at least one of a camera and a detector, that measures a shape of the workpiece upon use of the laser-machining tool and the cutting tool,
• a memory that stores machining data for the hybrid ultraprecision machining apparatus;
• and
• a processor, when executing a program stored in the memory, that creates the machine data,
• wherein the machining data includes laser machining data obtained by utilizing:
• information regarding an original shape corresponding to a shape of the workpiece;
• information regarding a roughly-machining shape to be removed from the workpiece by the laser-machining tool;
• and
• information regarding a stereoscopic model of an after-laser-machined shape, which is obtained by removing the information regarding the roughly-machining shape from the information regarding the original shape,
• wherein the processor creates the laser machining data on the basis of information regarding a plurality of sliced portions, which are obtained by slicing the stereoscopic model of the after-laser-machined shape, and
• wherein the processor extracts a machining portion to be roughly machined by the laser-machining tool, by determining whether or not a roughly-machining region in each sliced portion of the plurality of sliced portions penetrates a thickness of the sliced portion,
• wherein, when it is determined that the roughly-machining region in the sliced portion penetrates the thickness of the sliced portion, the processor combines information on a form of roughly-machining region appearing in the sliced portion with information on a form of roughly-machining region appearing in an adjacent sliced portion of the plurality of sliced portions, to create the laser-machining data regarding a primary rough machining of the laser machining, so that the roughly-machining region appearing in the sliced portion and the roughly-machining region appearing in the adjacent sliced portion are removed at one time, and
• when it is determined that the roughly-machining region in the sliced portion does not penetrate the thickness of the sliced portion, the processor provides the information on a form of roughly machining region appearing in the sliced portion with a condition of a secondary rough machining of the laser machining, in which a rough-finish machining of the laser machining is performed.