Tunable Q resonator

A method of signal switching, comprising:

• (a) providing a switching resonator, comprising:
• a substrate comprising a bottom electrode;
• a radial contour mode resonator disposed above the substrate;
• and
• a top electrode disposed above the resonator;
• wherein the top electrode is attached in part to the substrate;
• and
• (b) applying a bias voltage Vb between the bottom electrode and the top electrode.

A capacitive-piezoelectric disk resonator having a construct comprising:

• a silicon substrate;
• an SiO2 layer disposed on the silicon substrate;
• a silicon nitride layer disposed on the SiO2 layer;
• an AlN layer disposed on the silicon nitride layer;
• a polysilicon central stem disposed on the AlN layer;
• an AlN disk resonator supported by the central stem;
• a molybdenum bottom electrode disposed on the AlN layer;
• and
• a polysilicon deformable top electrode attached in part to the AlN layer;
• wherein the top electrode is disposed in part above the AlN disk resonator;
• wherein the bottom electrode is disposed in part below the AlN disk resonator;
• and
• wherein absent an electrical potential between the top and bottom electrodes, the AlN disk resonator does not contact either electrode.

A tunable resonator, comprising:

• a substrate comprising a bottom electrode;
• a resonator disposed above the substrate;
• and
• a top electrode disposed above the resonator;
• wherein the top electrode is attached in part to the substrate through a compliant structure;
• wherein when a bias voltage, Vb, is applied between the bottom electrode and the top electrode, the top electrode is displaced by the bias voltage, Vb, through movement of the top electrode through movement of the compliant structure;
• a top gap, gt, disposed between the resonator and one of the electrodes;
• wherein a series resonant frequency fs of the resonator is changed through alteration of the top gap, gt;
• a feedback control system that controls the bias voltage, Vb;
• wherein the series resonant frequency fs of the resonator is controlled within a design range.

A filter, comprising:

• (a) a tunable resonator, comprising:
• a substrate comprising a bottom electrode;
• a tunable resonator disposed above the bottom electrode;
• a top electrode disposed above the tunable resonator;
• wherein the top electrode is attached in part to the substrate;
• and
• a bias voltage Vb source electrically connected between the top electrode and the bottom electrode;
• (b) an input resonator, comprising:
• an input substrate, comprising an input bottom electrode;
• an input resonator disposed above the input substrate;
• and
• an input top electrode disposed above the input substrate;
• wherein an input capacitance at the input resonator has a value of Ci;
• (c) an output resonator, comprising:
• an output substrate, comprising an output bottom electrode;
• an output resonator disposed above the output substrate;
• and
• an output top electrode disposed above the output substrate;
• wherein an output capacitance at the output resonator has a value of Co;
• (d) an input coupler, wherein vibration from the input resonator is mechanically coupled to the tunable resonator;
• and
• (e) an output coupler, wherein vibration from the tunable resonator is mechanically coupled to the output resonator.