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US 10,048,147 B2Granted
Pressure sensor including a thin-film diaphragm provided with plural resistive bodies printed in a straight line and manufacturing method therefor
AssigneeSMC Corporation
InventorsMitsuhiro Saitoh, Yuta Oshima, Takeshi Yamagishi
Life of this patent
Estimating the term…
Abstract
A pressure sensor includes a ceramic sensor that is accommodated between a body and a holder. On an end surface of the sensor, plural resistive bodies are printed and fired in a straight line using a thick-film resistive paste material by screen printing.
Claims4
A pressure sensor comprising a body including a fluid passage into which a pressure fluid is introduced, and a ceramic sensor disposed on an end of the body and including a thin-film diaphragm portion that faces toward the fluid passage;
- wherein, on the diaphragm portion, plural resistive bodies, which are printed by thick-film printing, are provided in a straight line and are separated mutually at a predetermined distance from each other.
A manufacturing method for manufacturing a pressure sensor including a ceramic sensor, comprising the steps of:
- after carrying out surface processing with respect to the sensor, printing and firing wires with respect to an end surface of the sensor by thick-film printing using a conductive paste material;
- and
- by scraping a thick-film resistive paste material of a ruthenium base with respect to a screen mask, simultaneously printing and firing plural resistive bodies in a straight line by thick-film printing in a direction perpendicular to a direction of the scraping of the thick-film resistive paste material.
Dependencies are inferred from the claim text.