Stretchable electronics for artificial skin
AssigneeSamsung Electronics Co., Ltd.
InventorsDaehyeong Kim, Taeghwan Hyeon, Jaemin Kim, Mincheol Lee, Hyungjoon Shim
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Abstract
A stretchable electronic device for artificial skin and a method of manufacturing the same are disclosed. The stretchable electronic device for artificial skin includes a first encapsulation layer, a heater disposed on the first encapsulation layer, a second encapsulation layer disposed on the heater, a first sensor array layer disposed on the second encapsulation layer, and a third encapsulation layer disposed on the first sensor array layer.
Claims15
A stretchable electronic device for artificial skin, comprising:
- a first encapsulation layer;
- a heater disposed on the first encapsulation layer;
- a second encapsulation layer disposed on the heater;
- a first sensor array layer disposed on the second encapsulation layer;
- and
- a third encapsulation layer disposed on the first sensor array layer;
- wherein the first sensor array layer comprises a first passivation layer, a semiconductor pattern disposed on the first passivation layer, a first metal pattern disposed on the semiconductor pattern, and a second passivation layer disposed on the first metal pattern;
- and
- wherein the first sensor array layer comprises a pressure sensor, and the pressure sensor has a cavity in the first passivation layer to expose the semiconductor pattern.
A stretchable electronic device for artificial skin, comprising:
- a first encapsulation layer;
- a heater disposed on the first encapsulation layer;
- a second encapsulation layer disposed on the heater;
- a first sensor array layer disposed on the second encapsulation layer;
- and
- a third encapsulation layer disposed on the first sensor array layer,
- wherein the first sensor array layer comprises a strain sensor and a pressure sensor;
- and
- wherein the strain sensor and the pressure sensor have different curvatures depending on a position of a human body to which the stretchable electronic device is attached, and a strain induced by the human body is further relieved with an increase in the curvature.
A stretchable electronic device for artificial skin, comprising:
- a first encapsulation layer;
- a heater disposed on the first encapsulation layer;
- a second encapsulation layer disposed on the heater;
- a first sensor array layer disposed on the second encapsulation layer;
- and
- a third encapsulation layer disposed on the first sensor array layer,
- wherein the first sensor array layer comprises a temperature sensor, and wherein a divergence between I-V curves of the temperature sensor under different strains is decreased with an increase in a curvature of the temperature sensor.
A stretchable electronic device for artificial skin, comprising:
- a first encapsulation layer;
- a heater disposed on the first encapsulation layer;
- a second encapsulation layer disposed on the heater;
- a first sensor array layer disposed on the second encapsulation layer;
- and
- a third encapsulation layer disposed on the first sensor array layer,
- wherein the heater comprises:
- a third passivation layer,
- a second metal pattern disposed on the third passivation layer, and
- a fourth passivation layer disposed on the second metal pattern.
A stretchable electronic device for artificial skin, comprising:
- a first encapsulation layer;
- a heater disposed on the first encapsulation layer;
- a second encapsulation layer disposed on the heater;
- a first sensor array layer disposed on the second encapsulation layer;
- a third encapsulation layer disposed on the first sensor array layer;
- and
- a second sensor array layer disposed on the third encapsulation layer,
- wherein the second sensor array layer comprises a humidity sensor and the humidity sensor detects a change in capacitance induced by a change in permittivity of a sixth passivation layer, into which a water molecule is absorbed.
Dependencies are inferred from the claim text.