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US 10,043,768 B2Granted
Semiconductor device and method of manufacture thereof
AssigneeInfineon Technologies AG
InventorsThorsten Meyer, Ludwig Heitzer
Life of this patent
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Abstract
A semiconductor device and a method of making a semiconductor device are disclosed. The semiconductor device comprises a redistribution layer arranged over a chip, the redistribution layer comprising a first redistribution line. The semiconductor further comprises an isolation layer disposed over the redistribution layer, the isolation layer having a first opening forming a first pad area and a first interconnect located in the first opening and in contact with the first redistribution line.
Claims17
A semiconductor device comprising:
- a first isolation layer disposed over a chip;
- a redistribution layer disposed on the first isolation layer and over the chip, the redistribution layer comprising a first redistribution line;
- a second isolation layer disposed over the redistribution layer, the second isolation layer having a first opening forming a first pad area;
- and
- a first interconnect including solder material and located in the first opening, the first interconnect being in direct contact with the first redistribution line and directly contacting, in the first opening, at least partially (i) a surface of the first isolation layer underlying the first redistribution line and (ii) the second isolation layer.
2 more elements
A semiconductor device, comprising:
- a first isolation layer disposed over a chip;
- a redistribution layer disposed over the first isolation layer, the redistribution layer comprising a redistribution line;
- a second isolation layer disposed over the redistribution layer, the isolation layer having an opening forming a pad area;
- and
- an interconnect located in the opening and in direct contact with the redistribution line, the interconnect including solder material and being in direct contact with (i) a surface of the first isolation layer underlying the first redistribution line and (ii) the second isolation layer.
2 more elements
Dependencies are inferred from the claim text.