Fan scrubber and vacuum pump apparatus

A fan scrubber comprising:

• a casing having a gas draw-in port and a gas ejection port;
• a fan disposed in the casing;
• a nozzle from which a liquid is jetted into the casing;
• and
• a canned motor having a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on a periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions an interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed,
• wherein the fan is directly attached to the main shaft, and
• a liquid supply path which communicates with the nozzle and through which the liquid is supplied to the nozzle is formed in the main shaft.

A fan scrubber comprising:

• a casing having a gas draw-in port and a gas ejection port;
• a fan disposed in the casing;
• a nozzle from which a liquid is jetted into the casing;
• a canned motor having a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on a periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions an interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed,
• a scraper which moves along an inner wall surface of the gas draw-in port;
• and
• a third nozzle through which the liquid is jetted toward a position downstream of the scraper.