Method and system for automatically collecting semiconductor manufacturing parameters

A method for automatically collecting semiconductor manufacturing parameters of a manufacturing equipment, comprising:

• reporting semiconductor manufacturing parameters obtained by self-monitoring of the manufacturing equipment;
• obtaining storage locations in an electronic data capture corresponding to reported semiconductor manufacturing parameters and transporting the reported semiconductor manufacturing parameters and corresponding storage locations;
• receiving the reported semiconductor manufacturing parameters and the corresponding storage location and storing each reported semiconductor manufacturing parameters automatically into the electronic data capture of a manufacturing execution system according to the corresponding storage location, wherein;
• the manufacturing equipment corresponds to one or more vacuum chambers, one or more gas lines, or a combination of one or more vacuum chambers and one or more gas lines;
• and
• each semiconductor manufacturing parameter obtained from the self-monitoring of the manufacturing equipment has a state variable identifier and a collected event identifier such that each semiconductor manufacturing parameter is reported with the state variable identifier and the collected event identifier to obtain a measurement specification identifier for each semiconductor manufacturing parameter
• comparing between a reported semiconductor manufacturing parameter and a corresponding allowable specification;
• and
• continuing a normal manufacturing operation of the manufacturing equipment when the reported semiconductor manufacturing parameter does not exceed a range defined by the corresponding allowable specification.

A system for collecting semiconductor manufacturing parameters, comprising:

• an equipment parameter reporting module configured to report semiconductor manufacturing parameters obtained from self-monitoring of a manufacturing equipment;
• a parameter transporting module configured to obtain storage location in an electronic data capture for each reported semiconductor manufacturing parameter and transport the reported semiconductor manufacturing parameters and corresponding storage locations;
• and
• a parameter receiving module configured to receive the reported semiconductor manufacturing parameters and the corresponding storage locations and store each reported semiconductor manufacturing parameter automatically into the electronic data capture of a manufacturing execution system according to the corresponding storage location of each reported semiconductor manufacturing parameter, wherein the electronic data capture storing the storage locations also includes allowable specification for each reported semiconductor manufacturing parameter;
• a comparing module configured to compare between a reported semiconductor manufacturing parameter and a corresponding allowable specification;
• and
• a determining module configured to continue a normal manufacturing operation of the manufacturing equipment when the reported semiconductor manufacturing parameter does not exceed a range defined by the corresponding allowable specification.