Vibration device, electronic apparatus, and mobile object
AssigneeSeiko Epson Corporation
InventorKazuhiko Shimodaira
Life of this patent
Estimating the term…
Abstract
A vibration device which is possible to secure the fixing of a vibrating element and to reduce deterioration in characteristics of the vibrating element includes a substrate, a plurality of elastic members each of which includes a connection portion connected to a first surface of the substrate, and a support portion extending from the connection portion to a position separated from the connection portion, and a vibrating element that is supported at the support portion, in which the vibrating element is supported by the plurality of elastic members via three or more support portions.
Claims21
A vibration device comprising:
- a substrate;
- a plurality of elastic members each of which includes a connection portion connected to a first surface of the substrate, and a plurality of support portions extending laterally from the connection portion to a position separated from the connection portion;
- and
- a vibrating element that is supported at the support portions,
- the vibrating element being supported by the plurality of elastic members via three or more of the support portions.
A vibration device comprising:
- a substrate;
- a plurality of elastic members each of which includes a connection portion connected to a first surface of the substrate, and a plurality of support portions extending laterally from the connection portion to a position separated from the connection portion;
- and
- a vibrating element that is supported at the support portions,
- the vibrating element being supported by the plurality of elastic members via the support portions, at least one of the support portions being connected to the vibrating element by a conductive joining member and at least one other of the support portions being connected to the vibrating member by a non-conductive joining member.
Dependencies are inferred from the claim text.