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US 10,026,585 B2Granted
Emitter, electron gun using emitter, electronic apparatus using electron gun, and method of producing emitter
AssigneeNational Institute for Materials Science
InventorsJie Tang, Jinshi Yuan, Han Zhang, Luchang Qin
Life of this patent
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Abstract
The emitter of the present invention includes a nanowire. The nanowire is formed from a hafnium carbide (HfC) single crystal, and at least an end portion of the hafnium carbide single crystal, from which electrons are to be emitted, is covered with hafnium oxide (HfO2). In the emitter, the thickness of the hafnium oxide may be 1 nm to 20 nm.
Claims20
An emitter, comprising:
- a nanowire,
- wherein the nanowire is formed from a hafnium carbide (HfC) single crystal,
- at least an end portion of the hafnium carbide single crystal, from which electrons are to be emitted, is covered with hafnium oxide (HfO2) and
- a shape of the end portion, from which electrons are to be emitted, is formed in a hemispherical shape through field evaporation processing.
1 more element
Dependencies are inferred from the claim text.