Treatment solution supply method, treatment solution supply apparatus, and non-transitory computer-readable recording medium

A treatment solution supply apparatus configured to supply a treatment solution to a substrate, the apparatus comprising:

• a treatment solution supply pipe that supplies the treatment solution to the substrate;
• an electrode pair that is provided in the treatment solution supply pipe and applies a DC voltage to the treatment solution in the treatment solution supply pipe;
• a DC power supply that applies the DC voltage to the electrode pair;
• and
• a processor and a memory, the processor controls the DC power supply,
• wherein the treatment solution supply apparatus further comprises:
• a current detector that detects a current flowing between two points in the treatment solution in a state where the DC voltage is applied to the treatment solution, or
• the current detector and a potential difference detector that detects a potential difference between two points in the treatment solution supply pipe separate from each other in a facing direction of the electrode pair in a state where the DC voltage is applied to the treatment solution;
• wherein the processor is configured to execute a program stored in the memory to:
• control the DC power supply to increase the DC voltage when the detected current is more than a predetermined reference current, or when the detected current is more than the predetermined reference current and the potential difference detected by the potential difference detector is less than a reference potential difference.

A non-transitory computer-readable recording medium recording a program thereon for causing a treatment solution supply apparatus configured to supply a treatment solution to a substrate to perform a treatment solution supply method of supplying a treatment solution to a substrate,

• the treatment solution supply method comprising the steps of:
• applying a DC voltage to the treatment solution;
• detecting a current flowing between two points in the treatment solution, or detecting the current and a potential difference between the two points in a state where the DC voltage is applied to the treatment solution;
• and
• increasing the DC voltage when the detected current is more than a predetermined reference current, or when the detected current is more than the predetermined reference current and the detected potential difference is less than a reference potential difference.