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US 10,015,916 B1Granted
Removal of electrostatic charges from an interposer via a ground pad thereof for die attach for formation of a stacked die
AssigneeXilinx, Inc.
InventorJames Karp
Life of this patent
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Abstract
An apparatus relating generally to an interposer is disclosed. In such an apparatus, the interposer has a plurality of conductors for coupling an integrated circuit die to the interposer to provide a stacked die. The interposer includes a pad coupled to a conductive network of the interposer to dissipate electrostatic charge from the interposer.
Claims14
An apparatus, comprising:
- a passive interposer having a plurality of conductors for coupling two or more integrated circuit dies to the interposer to provide a stacked die and one or more microbumps extending from one or more microbump pads, the microbumps configured for coupling to the two or more integrated circuit dies;
- wherein the interposer includes an exposed conductive pad disposed outward and clear of areas of the interposer configured to receive the two or more integrated circuit dies, the exposed conductive pad coupled to a conductive network of the interposer configured to dissipate electrostatic charge from the interposer prior to the two or more integrated circuit dies being coupled to the interposer, and
- wherein the exposed conductive pad has a larger plan area than each of the one or more microbump pads.
A method, comprising:
- loading a passive interposer having a plurality of conductors for coupling two or more integrated circuit dies to the interposer to provide a stacked die and one or more microbumps extending from one or more microbump pads;
- grounding the interposer with a grounded probe;
- wherein the grounded probe is put in mechanical contact with an exposed conductive pad on the interposer, the exposed conductive pad coupled to a conductive network of the interposer configured for the grounding thereof to dissipate electrostatic charge from the interposer prior to the two or more integrated circuit dies being coupled to the interposer, the exposed conductive pad disposed outward and clear of areas of the interposer configured to receive the two or more integrated circuit dies, wherein the exposed conductive pad has a larger plan area than each of the one or more microbump pads;
- and
- coupling the two or more integrated circuit dies to the interposer via the microbumps extending from the microbump pads of the two or more integrated circuit dies while grounded via the grounded probe to provide the stacked die, wherein the exposed conductive pad has a larger plan area than each of the microbump pads.
2 more elements
Dependencies are inferred from the claim text.