# US 10,015,841 B2 · Micro heater and micro sensor and manufacturing methods thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,015,841 B2 - Document ID: US10015841B2 - Status: Granted - Kind: B2 - Application number: 14/864,184 - Filed: 2015-09-24 - Published: 2016-03-24 - Granted: 2018-07-03 - Earliest claimed: 2014-09-24 - Assignees: Point Engineering Co., Ltd. - Applicants: Point Engineering Co., Ltd. - Inventors: Bum Mo Ahn; Seung Ho Park; Sung Hyun Byun - Web page: https://patentgrep.com/patent/US10015841B2 ## CPC - H05B 3/03: Electrodes - H05B 3/262: {the insulating base being an insulated metal plate} - G01N 27/12: of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid {, for detecting components in the fluid} - H05B 2203/014: Heaters using resistive wires or cables not provided for in H05B3/54 - H05B 2203/017: Manufacturing methods or apparatus for heaters - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A micro heater and a micro sensor is capable of providing a heater having a small thermal capacity by forming an air gap which surrounds the heater wire, and forming the heater wire on a porous substrate. ## Claims ### Claim 1 A micro heater comprising: a porous substrate formed of an aluminum oxide porous layer; a heater electrode which is formed on said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire; and an air gap which surrounds said heater wire is formed in said porous substrate, wherein said air gap is formed by completely penetrating said porous substrate. ### Claim 2 (depends on 1) The micro heater according to claim 1, wherein a discoloration protection layer is formed on the upper side of said heater electrode and said discoloration protection layer comprises silicon dioxide or oxide series material. ### Claim 3 A micro heater comprising: a porous substrate; and a heater electrode which is formed in said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire, wherein a first supporting portion which supports said heater wire and a second supporting portion which supports said heater electrode pad are formed on said porous substrate, and an air gap is formed between said first supporting portion and said second supporting portion, and the shape of said second supporting portion is formed to be identical or similar to the shape of said heater electrode pad, wherein said air gap is formed by completely penetrating said porous substrate. ### Claim 4 A micro sensor comprising: a porous substrate formed of an aluminum oxide porous layer; a sensor electrode which is formed on said porous substrate and includes a sensor wire and a sensor electrode pad which is connected to said sensor wire; a heater electrode which is formed on said porous substrate and includes a heater electrode pad, and a heater wire which is connected to said heater electrode pad and disposed closer to said sensor wire than said sensor electrode pad; and an air gap which surrounds said heater wire and said sensor wire is formed in said porous substrate, wherein said air gap is formed by completely penetrating said porous substrate. ### Claim 5 (depends on 4) The micro sensor according to claim 4, wherein a sensing material covering said heater wire and said sensor wire is further included. ### Claim 6 A micro sensor comprising: a heater electrode which includes a heater wire wherein a plurality of first protrusions are formed in the end portion thereof, and a heater electrode pad being connected to said heater wire; a sensor electrode which includes a sensor wire wherein a plurality of second protrusions disposed between said first protrusions, and a sensor electrode pad being connected to said sensor wire; and an aluminum oxide porous layer which supports said heater electrode and said sensor electrode; and an air gap formed between said heater electrode pad and said sensor electrode pad by removing a portion of said aluminum oxide porous layer, wherein said air gap is formed by completely penetrating said aluminum oxide porous layer. ### Claim 7 (depends on 6) The micro sensor according to claim 6, wherein said aluminum oxide porous layer includes a first supporting portion which supports said heater wire and said sensor wire, wherein said air gap is formed outside of said first supporting portion. ### Claim 8 (depends on 7) The micro sensor according to claim 7, wherein a sensing material is additionally formed in the location corresponding to said first supporting portion. ### Claim 9 (depends on 6) The micro sensor according to claim 6, wherein said aluminum oxide porous layer includes: a first supporting portion which supports said heater wire and said sensor wire; a heater electrode pad support which supports said heater electrode pad and formed to have a same outline of said heater electrode pad but having a wider width than that of said heater electrode pad; and a sensor electrode pad support which supports said sensor electrode pad and formed to have a same outline of said sensor electrode pad but having a wider width than that of said sensor electrode pad. ### Claim 10 (depends on 6) The micro sensor according to claim 6, wherein a discoloration protection layer is formed on the upper side of said heater electrode or said sensor electrode, and said discoloration protection layer comprises silicon dioxide or oxide series material. ### Claim 11 A micro sensor comprising: a porous substrate; a sensor electrode which is formed on said porous substrate and includes a sensor wire and a sensor electrode pad which is connected to said sensor wire; and a heater electrode which is formed on said porous substrate and includes a heater wire and heater electrode pad which is connected to said heater wire, wherein said porous substrate includes: a sensor electrode pad support which supports said sensor electrode pad; and a heater electrode pad support which supports said heater electrode pad; and an air gap is formed between said heater electrode pad support and said sensor electrode pad support, wherein said air gap is formed by completely penetrating said porous substrate. ### Claim 12 A micro sensor comprising: a porous substrate; a sensor electrode which is formed on said porous substrate and includes a sensor wire, and a sensor electrode pad which is connected to said sensor wire; and a heater electrode which is formed on said porous substrate and includes a heater wire, and a heater electrode pad which is connected to said heater wire, wherein said porous substrate includes: a first supporting portion which supports said heater wire and said sensor wire; a heater electrode pad support which supports said heater electrode pad; a sensor electrode pad support which supports said sensor electrode pad; and an air gap is formed by removing all portions of said porous substrate except said first supporting portion, said heater electrode pad support, and said sensor electrode pad support, wherein said air gap is formed by completely penetrating said porous substrate. ### Claim 13 A micro sensor comprising: a heater electrode which includes a heater wire wherein a plurality of first protrusions are formed in the end portion thereof, and a first and a second heater electrode pads which are connected to both sides of said heater wire; a sensor electrode which includes a sensor wire wherein a plurality of second protrusions are disposed between said first protrusions, and a sensor electrode pad which is connected to said sensor wire; and a porous substrate which supports said heater electrode and said sensor electrode, wherein said porous substrate includes: a first supporting portion supporting said heater wire and said sensor wire; a first heater electrode pad support which supports said first heater electrode pad; a second heater electrode pad support which supports said second heater electrode pad; a sensor electrode pad support which supports said sensor electrode pad; and an air gap which is formed on an outer side of said first supporting portion, wherein said air gap is formed by completely penetrating said porous substrate. ### Claim 14 (depends on 13) The micro sensor according to claim 13, wherein at least a portion of said first heater electrode pad support, said second heater electrode pad support, and said sensor electrode pad support is separated from each other by said air gap. ### Claim 15 A micro heater comprising: a porous substrate formed of an aluminum oxide porous layer; a heater electrode which is formed on said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire; an air gap which surrounds said heater wire is formed in said porous substrate, wherein said air gap is formed by completely penetrating said porous substrate; and an opening, which is disposed in the lower portion of said heater wire and communicating with said air gap, is formed in the lower portion of said porous substrate. ### Claim 16 (depends on 15) The micro heater according to claim 15, wherein a plurality of pores are penetratingly formed along the vertical direction in said porous substrate; and said pores are communicating with said opening. ### Claim 17 A micro sensor comprising: a porous substrate formed of an aluminum oxide porous layer; a sensor electrode which is formed on said porous substrate and includes a sensor wire and a sensor electrode pad which is connected to said sensor wire; a heater electrode which is formed on said porous substrate and includes a heater electrode pad, and a heater wire which is connected to said heater electrode pad and disposed closer to said sensor wire than said sensor electrode pad; an air gap, which surrounds said heater wire and said sensor wire, is formed in said porous substrate; and an opening, which is disposed in the lower portion of said heater wire and communicating with said air gap, is formed in the lower portion of said porous substrate, wherein said air gap is formed by completely penetrating said porous substrate. ### Claim 18 (depends on 17) The micro sensor according to claim 17, wherein a sensing material is formed in said porous substrate in a way that said heater wire and said sensor wire are covered thereby.