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US 10,012,980 B2Granted
Modifying operational efficiency by repositioning process apparatus
AssigneeTokyo Electron Limited
InventorsTaku Mizutani, Ichiro Namioka, Toshihiko Iijima, Shigenori Todate
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Abstract
There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.
Claims5
A wafer or substrate production processing system comprising:
- a production efficiency improvement device configured to determine a distance between workpieces and each of a plurality of processing apparatuses arranged along a transfer path, and select a processing apparatus for processing the workpieces based on the determined distance between the workpieces and each of the plurality of processing apparatuses arranged along the transfer path;
- a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus;
- and
- a plurality of energy consumption managing units provided for the plurality of processing apparatuses and configured to manage energy consumption of the corresponding processing apparatuses,
- wherein the production efficiency improvement device includes:
- a first apparatus selecting unit which selects one or more processing apparatuses that processes workpieces from the plurality of processing apparatuses;
- and
- a second apparatus selecting unit which selects a processing apparatus having the shortest transfer distance from the predetermined position, from the one or more processing apparatuses selected by the first apparatus selecting unit based on positional information including the determined distance between the workpieces and each of the plurality of processing apparatuses, and
- wherein the production efficiency improvement device selects a processing apparatus processing the workpieces such that a total energy consumption of the plurality of processing apparatuses and the transfer apparatus does not exceed a predetermined maximum energy consumption, based on the energy consumption of the processing apparatuses managed by the energy consumption managing units and the energy consumption of the transfer apparatus.
6 more elements
A wafer or substrate production efficiency improvement device comprising:
- an apparatus selecting unit configured to determine a distance between workpieces and each of a plurality of processing apparatuses arranged along a transfer path, and select a processing apparatus that processes workpieces and has the shortest transfer distance from a predetermined position on the transfer path based on the determined distance between the workpieces and each of the plurality of processing apparatuses arranged along the transfer path;
- a plurality of energy consumption managing units provided for the plurality of processing apparatuses and configured to manage energy consumption of the corresponding processing apparatus;
- a first apparatus selecting unit which selects one or more processing apparatuses that processes workpieces from the plurality of processing apparatuses;
- and
- a second apparatus selecting unit which selects a processing apparatus having the shortest transfer distance from the predetermined position, from the one or more processing apparatuses selected by the first apparatus selecting unit base on positional information including the determined distance between the workpieces amd each of the plurality of processing apparatuses,
- wherein the production efficiency improvement device selects a processing apparatus processing the workpieces such that a total energy consumption of the plurality of processing apparatuses and a transfer apparatus does not exceed a predetermined maximum energy consumption, based on the energy consumption of the processing apparatuses managed by the energy consumption managing units and the energy consumption of the transfer apparatus.
3 more elements
Dependencies are inferred from the claim text.