Method for flattening sample in optical metrology
AssigneeBruker Nano, Inc.
InventorBryan Guenther
Life of this patent
Estimating the term…
Abstract
A vacuum mechanism for flattening bowed panel samples includes a support structure with coplanar support elements and a fixture with a movable component actuated by a vacuum source. The movable component has a top surface disposed above the support elements when no vacuum is applied and is capable of being drawn to a substantially coplanar position with the support elements when actuated by the vacuum source. The top surface is fluidly connected to the vacuum source and adapted to adhere to the overlaying surface of the sample when vacuum is applied, thereby flattening the sample when the movable component is drawn in by the same vacuum source.
Claims9
A method for removing a bowed area from a panel sample, comprising the following steps:
- supporting the bowed area of the panel sample with support elements;
- providing a fixture with a movable component actuated by a vacuum source, the movable component having a top surface disposed above said support elements when no vacuum is applied and being drawn to a substantially coplanar position with said support elements when actuated by the vacuum source, said top surface being fluidly connected to the vacuum source and adapted to adhere to an overlaying surface of said bowed area of the panel sample when vacuum is applied;
- and
- operating said vacuum source to apply suction to said overlaying surface of the bowed area of the panel sample and to actuate the movable component to draw the bowed area to said substantially coplanar position with the support elements.
Dependencies are inferred from the claim text.