Resonator electrode shields
AssigneeSiTime Corporation
InventorsDavid Raymond Pedersen, Aaron Partridge, Thor Juneau
Life of this patent
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Abstract
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
Claims20
A microelectromechanical system (MEMS) resonator comprising:
- first and second oxide layers;
- and
- a semiconductor layer disposed between the first and second oxide layers and having formed therein:
- a resonant MEMS structure;
- a first electrode to effect mechanical motion of the resonant MEMS structure in response to application of a time-varying voltage to the first electrode;
- a second electrode to generate a timing signal corresponding to the mechanical motion of the resonant MEMS structure;
- and
- an electrical shielding structure disposed adjacent the first electrode to reduce interference with the timing signal resulting from application of the time-varying voltage to the first electrode.
A method of fabricating a microelectromechanical system (MEMS) resonator, the method comprising:
- disposing a semiconductor layer between first and second oxide layers;
- and
- forming within the semiconductor layer:
- a resonant MEMS structure;
- a first electrode to effect mechanical motion of the resonant MEMS structure in response to application of a time-varying voltage to the first electrode;
- a second electrode to generate a timing signal corresponding to the mechanical motion of the resonant MEMS structure;
- and
- an electrical shielding structure disposed adjacent the first electrode to reduce interference with the timing signal resulting from application of the time-varying voltage to the first electrode.
A microelectromechanical system (MEMS) resonator comprising:
- first and second oxide layers;
- and
- a semiconductor layer disposed between the first and second oxide layers and having formed therein:
- a resonant MEMS structure;
- means for effecting mechanical motion of the resonant MEMS structure in response to application of a time-varying voltage to the first electrode;
- means for generating a timing signal corresponding to the mechanical motion of the resonant MEMS structure;
- and
- an electrical shielding structure disposed adjacent the means for effecting mechanical motion to reduce interference with the timing signal resulting from application of the time-varying voltage to the means for effecting mechanical motion.
Dependencies are inferred from the claim text.