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US 10,003,018 B1Granted
Vertical multi-batch magnetic annealing systems for reduced footprint manufacturing environments
AssigneeTokyo Electron Limited
InventorsIan Colgan, Ioan Domsa, George Eyres, Saito Makoto, Noel O'Shaughnessy, Toru Ishii, David Hurley
Life of this patent
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Abstract
Embodiments are described for annealing systems and related methods to process microelectronic workpieces using vertical multi-batch perpendicular magnetic annealing systems that allow for a side-by-side configuration of multiple annealing systems to satisfy reduced footprint requirements.
Claims30
A manufacturing system to anneal multiple batches of workpieces, comprising:
- a first annealing system positioned on a fabrication floor, comprising:
- a vertical furnace having a processing space;
- a workpiece boat to carry at least one hundred workpieces;
- a boat loader arranged beneath the vertical furnace and configured to vertically translate the workpiece boat and position the workpieces within the processing space;
- and
- a magnet positioned outside the vertical furnace and configured to generate a magnetic field within the processing space;
- and
- a second annealing system positioned on the fabrication floor, comprising:
- a vertical furnace having a processing space;
- a workpiece boat to carry at least one hundred workpieces;
- a boat loader arranged beneath the vertical furnace and configured to vertically translate the workpiece boat and position the workpieces within the processing space;
- and
- a magnet positioned outside the vertical furnace and configured to generate a magnetic field within the processing space;
- wherein the first and second annealing systems are positioned on the fabrication floor to have a combined footprint of less than 9.5 m2 (square meters).
11 more elements
A method to anneal multiple batches of workpieces, comprising:
- loading at least one hundred workpieces into a first workpiece boat for a first annealing system positioned on a fabrication floor, the first annealing system further comprising:
- a vertical furnace having a processing space;
- a boat loader arranged beneath the vertical furnace and configured to vertically translate the workpiece boat and position the workpieces within the processing space;
- and
- a magnet positioned outside the vertical furnace and configured to generate a magnetic field within the processing space;
- loading at least one hundred workpieces into a second workpiece boat for a second annealing system positioned on a fabrication floor, the second annealing system further comprising:
- a vertical furnace having a processing space;
- a boat loader arranged beneath the vertical furnace and configured to vertically translate the workpiece boat and position the workpieces within the processing space;
- and
- a magnet positioned outside the vertical furnace and configured to generate a magnetic field within the processing space;
- vertically translating the first and second workpieces into the processing spaces of the vertical furnaces using the boat loaders for the first and second annealing systems;
- elevating temperatures for the least one hundred workpieces loaded into the first workpiece boat and for the least one hundred workpieces loaded into the second workpiece boat;
- and
- generating magnetic fields within the processing space for the first annealing system using the magnet for the first annealing system and within the processing space for the second annealing system using the magnet system for the second annealing system;
- wherein the first and second annealing systems are positioned on the fabrication floor to have a combined footprint of less than 9.5 m2 (square meters).
12 more elements
Dependencies are inferred from the claim text.