Bottle change apparatus, substrate treatment apparatus, bottle change method, bottle cap, bottle cap change apparatus and bottle cap change method

A bottle change apparatus comprising a change mechanism that changes a bottle storing a treatment solution therein,

• the bottle comprising a bottle cap that seals an opening portion of the bottle,
• the bottle cap comprising:
• a treatment solution straw part that forms a treatment solution flow passage for supplying the treatment solution in the bottle to an outside of the bottle and extends to an inside of the bottle;
• and
• a treatment solution connecting part that is provided at an end portion outside the bottle of the treatment solution straw part,
• said change mechanism comprising:
• a connection mechanism part comprising a treatment solution pipe which is connected to the treatment solution connecting part of the bottle and through which the treatment solution supplied from the bottle flows;
• a slide or rotation mechanism that mounts the bottle at a connection position where the treatment solution connecting part and the treatment solution pipe are connected together;
• and
• a guide with guide surface that receives the bottle cap, the guide positions the bottle so that the treatment solution connecting part of the bottle and the treatment solution pipe are connected together at said slide or rotation mechanism,
• wherein said connection mechanism part comprises:
• an internal raising and lowering part that is supported to be movable in the vertical direction, that supports the treatment solution pipe, and that is raised and lowered along a vertical direction so that a connection between the treatment solution connecting part and the treatment solution pipe is released, or so that the treatment solution connecting part is connected to the treatment solution pipe;
• and
• a rotation part that houses the internal raising and lowering part, and that is supported to be rotatable so that the rotation part remains stationary in the vertical direction when the rotation part rotates,
• wherein the rotation part has a groove extending along a direction inclining with respect to the vertical direction,
• wherein the internal raising and lowering part has a projection portion that is fitted into the groove.

A substrate treatment apparatus comprising a bottle change apparatus that changes a bottle storing a treatment solution therein, and a substrate treatment unit that treats a substrate using the treatment solution supplied from a bottle which has been changed by said bottle change apparatus,

• the bottle comprising a bottle cap that seals an opening portion of the bottle,
• the bottle cap comprising:
• a treatment solution straw part that forms a treatment solution flow passage for supplying the treatment solution in the bottle to an outside of the bottle and extends to an inside of the bottle;
• and
• a treatment solution connecting part that is provided at an end portion outside the bottle of the treatment solution straw part,
• said change mechanism comprising:
• a connection mechanism part comprising a treatment solution pipe which is connected to the treatment solution connecting part of the bottle and through which the treatment solution supplied from the bottle flows;
• and
• a slide or rotation mechanism that transfers the bottle to a connection position where the treatment solution connecting part and the treatment solution pipe are connected together,
• wherein said connection mechanism part comprises:
• an internal raising and lowering part that is supported to be movable in the vertical direction, that supports the treatment solution pipe, and that is raised and lowered along a vertical direction so that a connection between the treatment solution connecting part and the treatment solution pipe is released, or so that the treatment solution connecting part is connected to the treatment solution pipe;
• and
• a rotation part that houses the internal raising and lowering part, and that is supported to be rotatable so that the rotation part remains stationary in the vertical direction when the rotation part rotates,
• wherein the rotation part has a groove extending along a direction inclining with respect to the vertical direction,
• wherein the internal raising and lowering pat has a projection portion that is fitted into the groove.